Hi, we just deployed a vMX100 in an azure CSP environment. The link to the instructions is below. Also, the deployment failed a couple of times because it had "-" in the device name, resource group, etc. Once we removed the "-" from the names it deployed and connected to the Meraki dashboard.
https://documentation.meraki.com/MX/Installation_Guides/vMX_Setup_Guide_for_Microsoft_Azure